Concept and modeling analysis of a high fidelity multimode deformable mirror
Author:
Publisher
The Optical Society
Reference19 articles.
1. Aberration control for 70-nm optical lithography
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Development of a Bimorph Deformable Mirror Driven by Positive-voltage Actuators at Edge;ACTA PHOTONICA SINICA;2019
2. Development of a unimorph deformable mirror with water cooling;Optics Express;2017-11-15
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