Model-based defect detection on structured surfaces having optically unresolved features-Reference-Cited by-同舟云学术

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Model-based defect detection on structured surfaces having optically unresolved features

Published:2015-10-13 Issue:30 Volume:54 Page:8872
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

O’Connor Daniel,Henning Andrew J.,Sherlock Ben,Leach Richard K.,Coupland Jeremy,Giusca Claudiu L.

Funder

European Research Council (ERC)

UK National Measurement System

Publisher

The Optical Society

Reference26 articles.

1. Automatic PCB Inspection Algorithms: A Survey

2. Computer-Vision-Based Fabric Defect Detection: A Survey

3. Automated Visual Inspection: A Survey

4. Open questions in surface topography measurement: a roadmap

5. Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology;Measurement Science and Technology;2018-05-23

2. Fast and cost-effective in-process defect inspection for printed electronics based on coherent optical processing;Optics Express;2018-05-16

3. Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers;Applied Optics;2017-03-31

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