Author:
Jin Naijun,Liu Yifan,Lee Dahyeon,Cheng Haotian,McLemore Charles A.,Halladay Samuel,Luo Yizhi,Mason David,Diddams Scott A.,Quinlan Franklyn,Rakich Peter
Abstract
We present a wafer-level fabrication method for high-Q, compact vacuum-gap Fabry-Pérot resonators. With quality factors surpassing one billion at 1560 nm, these resonators are well-suited in a range of applications as frequency references.