Author:
Taudt Christopher,Hartmann Peter
Abstract
Dithering of spectral interferometric data helps to reduce intensity noise and improve fitting accuracy. A simple phase recovery method is developed using dithering to enhance measurement range in profilometry.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Smart Optical Inline Metrology;Recent Advances in Microelectronics Reliability;2024