Method for exposure dose monitoring and control in scanning beam interference lithography-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Method for exposure dose monitoring and control in scanning beam interference lithography

Published:2021-03-22 Issue:10 Volume:60 Page:2767
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Song Ying,Liu Yujuan,Jiang Shan,Zhu Yang,Zhang Liu,Liu Zhaowu^ORCID

Funder

National Natural Science Foundation of China

Jilin Scientific and Technological Development Program

Natural Science Foundation of Jilin Province

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference16 articles.

1. Image metrology and system controls for scanning beam interference lithography

2. Nanometer-accurate grating fabrication with scanning beam interference lithography

3. Beam Alignment and Convergence Analysis of Scanning Beam Interference Lithography Systems

4. Heterodyne period measurement in a scanning beam interference lithography system

5. Optical lithography

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Accurate measurement and adjustment method for interference fringe direction in a scanning beam interference lithography system;Optics Express;2023-08-09

2. Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography;Applied Sciences;2022-08-08

3. Active control technology of a diffraction grating wavefront by scanning beam interference lithography;Optics Express;2021-10-25

4. Analysis and design of fringe phase control system for scanning beam interference lithography;Optical Engineering;2021-06-24

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3