Design concept for diffractive elements shaping partially coherent laser beams
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Laser-machining experiment with an excimer laser and a kinoform
2. Diffractive shaping of excimer laser beams
3. Design and fabrication of computer-generated beam-shaping holograms
4. Design of computer-generated beam-shaping holograms by iterative finite-element mesh adaption
5. The concept of partial coherence in optics
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1. Designing diffractive optical elements for shaping partially coherent beams by proximity correction;Optics Express;2023-04-17
2. Time-sequential phase only sub holograms;Emerging Digital Micromirror Device Based Systems and Applications XIII;2021-03-05
3. Optics and Apparatus for Excimer Laser/EUV Microprocessing;Handbook of Laser Micro- and Nano-Engineering;2021
4. Optics and Apparatus for Excimer Laser/EUV Microprocessing;Handbook of Laser Micro- and Nano-Engineering;2020
5. Over compensation algorithm for laser beam shaping using a deformable freeform mirror;Optik;2019-12
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