Sharp and rectified imaging of plane test objects in diffractive grazing incidence interferometers
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference20 articles.
1. Oblique incidence interferometry of rough surfaces using a novel Dove-prism spectrometer
2. Oblique incidence interferometry applied to non-optical surfaces
3. Semiconductor wafer and technical flat planeness testing interferometer
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Calibration of geometric distortion based on a reference sheet in oblique laser interferometry;Optik;2019-04
2. Cylinder stitching interferometry: with and without overlap regions;Fifth International Conference on Optical and Photonics Engineering;2017-06-13
3. Stitching interferometry of full cylinder by use of the first-order approximation of cylindrical coordinate transformation;Optics Express;2017-02-06
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