Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher-Reference-Cited by-同舟云学术

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Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher

Published:2014-05-08 Issue:14 Volume:53 Page:3075
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Beaucamp Anthony,Namba Yoshiharu,Charlton Phillip

Funder

Japan Society for the Promotion of Science (JSPS)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference9 articles.

1. Improvement of total quality on EUV mask blanks toward volume production

2. Development status of EUVL mask blank and substrate

3. Finishing of optical moulds to λ /20 by automated corrective polishing

4. Use of the ‘Precessions’™ process for prepolishing and correcting 2D & 2½D form

5. Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Review on high efficiency and high precision compliant polishing method;The International Journal of Advanced Manufacturing Technology;2024-04-01

2. Theoretical and experimental investigation of material removal in semi-rigid bonnet polishing of binderless tungsten carbide;Journal of Materials Research and Technology;2023-05

3. Study on optimization of the dynamic performance of the robot bonnet polishing system;The International Journal of Advanced Manufacturing Technology;2023-02-08

4. Effect of the Binder during Ultra-Precision Polishing of Tungsten Carbide Using a Semirigid Bonnet Tool;Materials;2022-11-23

5. Morphology characterization of polishing spot and process parameters optimization in magnetorheological finishing;Journal of Manufacturing Processes;2022-08

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