Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 45 nm-Reference-Cited by-同舟云学术

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Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 45 nm

Published:2014-10-09 Issue:29 Volume:53 Page:6846
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Ejima T.,Hatano T.,Ohno K.,Fukayama T.,Aihara S.,Yanagihara M.,Tsuru T.

Funder

Japan Society for the Promotion of Science (JSPS)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference18 articles.

1. Soft X-ray microscopy at a spatial resolution better than 15 nm

2. Recent progress of EUV full-field exposure tool in Selete

3. High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms

4. At-Wavelength Extreme Ultraviolet Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of laboratory-type soft X-ray microscope, CXRM, in Water-window using LPP light source;Microscopy and Microanalysis;2018-08

2. Development of Soft X-Ray Microscope in Water Window Using Laser-Produced Plasma Light Source;Springer Proceedings in Physics;2018

3. Cr/Sc/Mo multilayer for condenser optics in water window microscopes;Journal of Electron Spectroscopy and Related Phenomena;2017-10

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