Affiliation:
1. North University of China
Abstract
Whispering-gallery-mode crystalline resonators currently maintain the best quality factor (
Q
) record; however, compact on-chip packaging is still a challenge, although various coupling architectures have been developed. Here, a chemical etching method is proposed to fabricate a miniaturized tapered fiber waveguide on silicon substrate. The Marangoni effect is implemented to reduce the surface roughness of the cone region. The optical loss of 0.1 dB/mm is obtained, and the
Q
of the on-chip crystalline resonator exceeds
1
0
8
. Additionally, thermoelectric cooler (TEC) is implanted in the package to actively customize the temperature, and the temperature response of 18 pm/°C is consistent with the theoretical calculation.
Funder
National Natural Science Foundation of China
Joint Funds of the National Natural Science Foundation of China
Innovative Research Group Project of National Natural Science Foundation of China
Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献