Affiliation:
1. Albasense
2. Changchun University of Science and Technology
3. University of Strathclyde
4. University of Glasgow
Abstract
This work presents the characterization of the optical and mechanical
properties of thin films based on
(
T
a
2
O
5
)
1
−
x
(
S
i
O
2
)
x
mixed oxides deposited by microwave
plasma assisted co-sputtering, including post-annealing treatments.
The deposition of low mechanical loss materials (
3
×
10
−
5
) with a high refractive index (1.93)
while maintaining low processing costs was achieved and the following
trends were demonstrated: The energy band gap increased as the
S
i
O
2
concentration was increased in the
mixture, and the disorder constant decreased when the annealing
temperatures increased. Annealing of the mixtures also showed positive
effects to reduce the mechanical losses and the optical absorption.
This demonstrates their potential as an alternative high-index
material for optical coatings in gravitational wave detectors using a
low-cost process.
Funder
Science and Technology Facilities
Council
University of the West of
Scotland
University of Strathclyde
University of Glasgow
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
2 articles.
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