Charge emission and precursor accumulation in the multiple-pulse damage regime of silicon
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Statistical and Nonlinear Physics
Reference9 articles.
1. Heterogeneous nucleation of damage in crystalline silicon with picosecond 1.06‐μm laser pulses
2. Phase transformation on and charged particle emission from a silicon crystal surface, induced by picosecond laser pulses
3. Comment on ‘‘Phase transformation on and charged particle emission from a Si crystal surface induced by ps laser pulses’’
4. Time‐resolved thermionic and photoemission from nanosecond, pulsed laser excited germanium and silicon
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1. A study of laser-induced surface defects in silicon and impact on electrical properties;Journal of Applied Physics;2018-12-14
2. Wavelength scaling of silicon laser ablation in picosecond regime;Journal of Applied Physics;2017-07-28
3. Analysis on the thermal effect of the silicon material induced by laser pulse trains;Optik;2016-05
4. Ablation of silicon with bursts of femtosecond laser pulses;SPIE Proceedings;2016-03-09
5. Nanosecond laser annealing to decrease the damage of picosecond laser ablation of anti-reflection layers on textured silicon surfaces;SPIE Proceedings;2012-10-12
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