Large-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging

Author:

Zhou Kui,Wang Xiejun,Jing Xialei,Wang Fei,Zhang Qian,Chen Fei,Hao Jia,Deng Chenwei1,Zhou Jian2,Yu Yiting

Affiliation:

1. Beijing Institute of Technology

2. Xi’an Modern Control Technology Research Institute

Abstract

Longwave infrared spectral imaging (LWIR-SI) has potential in many important civilian and military fields. However, conventional LWIR-SI systems based on traditional dispersion elements always suffer the problems of high cost, large volume and complicated system structure. Micro-electro-mechanical systems Fabry-Perot filtering chips (MEMS-FPFC) give a feasible way for realizing miniaturized, low cost and customizable LWIR-SI systems. The LWIR MEMS-FPFC ever reported can’t meet the demands of the next-generation LWIR-SI systems, due to the limitation of small aperture size and nonlinear actuation. In this work, we propose a large-aperture, widely and linearly tunable electromagnetically actuated MEMS-FPFC for LWIR-SI. A multi-field coupling simulation model is built and the wafer-scale bulk-micromachining process is applied to realize the design and fabrication of the proposed MEMS-FPFC. Finally, with the rational structural design and fabrication process, the filtering chip after packaging has an aperture size of 10 mm, which is the largest aperture size of LWIR MEMS-FPFC ever reported. The fabricated electromagnetically actuated MEMS-FPFC can be tuned continuously across the entire LWIR range of 8.39-12.95 µm under ±100 mA driving current with a pretty good linear response of better than 98%. The developed electromagnetically actuated MEMS-FPFC can be directly used for constructing miniaturized LWIR-SI systems, aiming for such applications as military surveillance, gas sensing, and industry monitoring.

Funder

Science, Technology and Innovation Commission of Shenzhen Municipality

Science and Development Program of Local Lead by Central Government, Shenzhen Science and Technology Innovation Committee under Grant

National Natural Science Foundation of China

Natural Science Foundation of Ningbo

Key Research and Development Projects of Shaanxi Province

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3