Coherence effects in surface roughness induced by vacuum ultraviolet F_2 laser ablation
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference10 articles.
1. Review of technology for 157-nm lithography
2. F2-laser ablation patterning of dielectric layers
3. 157-nm laser micromachining of N-BK7 glass and replication for microcontact printing
4. Efficient refractive-index modification of fused silica by a resonance-photoionization-like process using F_2 and KrF excimer lasers
5. Precision measurement of wavelengths emitted by a molecular fluorine laser at 157 nm
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 193 nm ArF laser ablation and patterning of chitosan thin films;Applied Physics A;2018-05-23
2. Optimum Laser Beam Characteristics for Achieving Smoother Ablations in Laser Vision Correction;Investigative Opthalmology & Visual Science;2017-04-06
3. Optical coherence tomography for process control of laser micromachining;Review of Scientific Instruments;2010-03
4. First- and second-order statistics of partially coherent, high-numerical-aperture optical fields;Optics Letters;2008-01-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3