Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference6 articles.
1. High spatial resolution subsurface microscopy
2. Two-photon optical beam induced current imaging through the backside of integrated circuits
3. Two-photon photocurrent imaging of vertical cavity surface emitting lasers
4. Three-dimensional imaging of a silicon flip chip using the two-photon optical-beam induced current effect
5. Aberrations and allowances for errors in a hemisphere solid immersion lens for submicron-resolution photoluminescence microscopy
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