Parallel optical nanolithography using nanoscale bowtie aperture array
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference15 articles.
1. Matching the Resolution of Electron Beam Lithography by Scanning Near-Field Photolithography
2. Sub-diffraction-limited patterning using evanescent near-field optical lithography
3. Surface Plasmon Interference Nanolithography
4. Mechanisms for Enhancing Power Throughput from Planar Nano-Apertures for Near-Field Optical Data Storage
5. Ridge waveguide as a near field aperture for high density data storage
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