Angle-resolved polarimetric phase measurement for the characterization of gratings
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference9 articles.
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Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Polarization of grating diffraction simulated by vector Kirchhoff model;SPIE Proceedings;2007-09-13
2. Interferometric measurement of the phase of diffracted waves near the plasmon resonances of metallic gratings;Applied Optics;2001-11-01
3. Noninvasive characterization of continuous-profile blazed diffraction gratings;Applied Optics;2001-06-01
4. Specular spectroscopic scatterometry;IEEE Transactions on Semiconductor Manufacturing;2001-05
5. Interferometric characterization of subwavelength lamellar gratings;Applied Optics;1999-08-10
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