Author:
Perner Lukas W.,Winkler Georg,Truong Gar-Wing,Follman David,Fellinger Jakob,Prinz Maximilian,Puchegger Stephan,Cole Garrett D.,Heckl Oliver H.
Abstract
We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.