Author:
Randel Emmett,Davenport Aaron,Osovsky Ruth,Lalande Emile ´,Chicoine Martin,Schiettekatte François,Markosyan Ashot,Bassiri Riccardo,Fejer Martin M.,Menoni Carmen S.
Abstract
We report on the effects of annealing on the residual film stress in titania germania mixtures grown by ion beam sputter deposition. Understanding stress during processing is critical in designing robust multilayer coatings.