Author:
Mingels Stephan,van Pelt Thomas,Illyaskutty Navas,Tezcan Deniz Sabuncuoglu,Hagedorn Harro
Abstract
We developed a novel sputter process for deposition of amorphous layers from TiO2 with low defects levels for precision optics and photonics applications. The layer properties were investigated by XSEM, GIXRD, and particle measurements.