Author:
Rüsseler Anna K.,Gehrke Philipp,Hoffmann Gerd A.,Schönsee Guido,Thiel Axel,Vitt Martina,Wienke Andreas,Ristau Detlev
Abstract
To unlock the benefits of thin-film filters, produced by means of ion beam sputtering, for compact, hybrid integrated optical systems, we have implemented a sacrificial-substrate approach to create high-precision, miniaturized, substrate-free filters.
Cited by
1 articles.
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