Light-Scattering Properties of Low Refractive Index SiO2 Optical Thin Films Deposited by a Combination Coating Method of Sputter Deposition and Electron Beam Deposition

Abstract

This report discusses a method for evaluating the light-scattering properties by pores in low refractive index SiO2 optical thin films that were deposited by a combination coating method of sputter deposition and electron beam deposition.