Author:
Sytchkova A.,Protopapa M.L.,Olivero P.,Burresi E.,Tapfer L.,Palmisano M.,Pesce E.,Dunatov T.,Wang Y.,He H.
Abstract
ALD-grown ZrO2 films underwent irradiation by 100keV protons at various fluences. The induced structural damage modeled by SRIM was compared with the optical properties change characterized by ellipsometry, spectrophotometry and X-ray reflectivity.