Femtosecond laser printing-assisted etching tailored hard and brittle micro-convex surface

Abstract

We report a femtosecond laser print-assisted dry etching technology for high-efficiency, high-quality, and tailored fabricating of a micro-convex surface (MCS) on hard and brittle materials. Liquid ultraviolet curing adhesive (UVCA) was transferred from a donor substrate to a receiving substrate by femtosecond laser-induced forward transfer, and the transferred microdroplet spontaneously has a smooth surface under the action of surface tension. And then an MCS with a high-quality surface was formed on hard and brittle materials by UV curing and dry etching. The effects of laser parameters and receiving substrate surface free energy on MCS morphology were investigated. According to the variation of the numerical aperture, the two methods to change the morphology of the MCS were divided into independent/joint regulation of diameter and height. We showed that a hexagonal array containing a variety of MCS morphologies can be fabricated on a fused silica by setting the appropriate parameters. And the fabrication time of an MCS in a large-area array was only 1.1 s.