Demonstration of submicron square-like silicon waveguide using optimized LOCOS process
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference9 articles.
1. Fabrication of ultralow-loss Si/SiO_2 waveguides by roughness reduction
2. Ultracompact optical buffers on a silicon chip
3. Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation
4. Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)
5. Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation
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