Optimal modified lateral shearing interferometer for submicro-defects measurement of transparent objects-Reference-Cited by-同舟云学术

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Optimal modified lateral shearing interferometer for submicro-defects measurement of transparent objects

Published:2017-09-12 Issue:27 Volume:56 Page:7504
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Seo Kwang-Beom,Shin Seung-Ho

Funder

National Research Foundation of Korea (NRF)

Kangwon National University (KNU)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference29 articles.

1. Automated Visual Inspection: A Survey

2. Automatic optical inspection for detecting defects on printed circuit board inner layers

3. Application of Neural Networks in Optical Inspection and Classification of Solder Joints in Surface Mount Technology

4. Automated visual inspection in the semiconductor industry: A survey

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1. Wavelength-tuning phase-shifting interferometry of transparent plates using sub-signal frequency correction;Measurement;2022-12

2. A general auto-shift minimal-step phase-shifting algorithm for arbitrary cavity length;Optics and Lasers in Engineering;2022-02

3. Optimal modified lateral shearing interferometer with axial range extension by using a dual optical plate;Applied Optics;2020-08-03

4. On-line detection method based on optimal modified lateral shearing interferometry for evaluating the damage growth characteristics;Japanese Journal of Applied Physics;2019-09-06

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