Impact of partial coherence on the apparent optical transfer function derived from the response to amplitude edges
Author:
Funder
Dutch Cyttron II Research Consortium
Publisher
The Optical Society
Reference26 articles.
1. The concept of partial coherence in optics
2. On the diffraction theory of optical images
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4. Aberration effects in an optical measuring microscope
5. Image of a periodic complex object in an optical system under partially coherent illumination
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2. Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy;Optics Express;2019-10-02
3. Generalized quantification of three-dimensional resolution in optical diffraction tomography using the projection of maximal spatial bandwidths;Journal of the Optical Society of America A;2018-10-24
4. Dimensional measurement sensitivity analysis for a MoSi photomask using DUV reflection scatterfield imaging microscopy;Photomask Technology;2017-11-08
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