Understanding the tool influence function during sub-aperture belt-on-wheel glass polishing

Author:

Suratwala T.1ORCID,Ross J.2,Steele R.1,Tham G.1,Wong L.1,Wolfs F.2,Defisher S.2ORCID,Bechtold R.2,Rinkus M.2,Mah C.1

Affiliation:

1. Lawrence Livermore National Laboratory

2. OptiPro Systems

Abstract

The tool influence function (TIF) during sub-aperture belt-on-wheel polishing has been evaluated as a function of various process conditions (belt use/wear, dwell time, displacement, belt velocity, and wheel modulus and diameter) on fused silica glass workpieces using C e O 2 polishing media. TIF spots are circular or elliptical in shape with a largely flat bottom character. The volumetric removal rate varies significantly with belt use (or wear), stabilizing after 15 m i n of use. A modified Preston model, where the pressure dependence is adjusted using a different scaling of the wheel modulus ( E w 0.5 ), largely predicts the volumetric removal rate over the range of process conditions evaluated. The relatively high volumetric removal rate of 30 60 m m 3 / h using a fixed C e O 2 -in-resin-host belt offers a rapid, and hence, more economical, initial polish of aspheric and freeform optics.

Funder

U.S. Department of Energy

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

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