Affiliation:
1. Lawrence Livermore National Laboratory
2. OptiPro Systems
Abstract
The tool influence function (TIF) during sub-aperture belt-on-wheel polishing has
been evaluated as a function of various process conditions (belt
use/wear, dwell time, displacement, belt velocity, and wheel modulus
and diameter) on fused silica glass workpieces using
C
e
O
2
polishing media. TIF spots are
circular or elliptical in shape with a largely flat bottom character.
The volumetric removal rate varies significantly with belt use (or
wear), stabilizing after
∼
15
m
i
n
of use. A modified Preston model,
where the pressure dependence is adjusted using a different scaling of
the wheel modulus (
E
w
0.5
), largely predicts the volumetric
removal rate over the range of process conditions evaluated. The
relatively high volumetric removal rate of
30
−
60
m
m
3
/
h
using a fixed
C
e
O
2
-in-resin-host belt offers a rapid,
and hence, more economical, initial polish of aspheric and freeform
optics.
Funder
U.S. Department of Energy
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
1 articles.
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