Laser transverse dual differential confocal radius measurement with high efficiency and high precision

Abstract

To meet the need for rapid, high-precision, and non-contact measurement of the radius of curvature (ROC) for large quantities of spherical optics, a radius measurement method based on transverse dual differential confocal (TDDC) detection is proposed in this study. First, a template S0 with a known ROC, R 0, is axially scanned on its confocal position to obtain the fitted linear function lTDDC(z) using TDDC. Second, the template S0 is replaced by S n , which is one of the test sample in large quantities, then the single point TDDC intensity ITDDC(Δzn) is captured without scan, which will be applied to obtain the defocus Δzn according to the linear function lTDDC(z). Finally, the ROC Rn under test is calculated using Δzn and R 0. Simulation and experiments show that the measurement accuracy can achieve 8.0 ppm, and the measurement efficiency is 60 times higher than that of the traditional differential confocal scanning measurement. Measurement based on TDDC only requires scanning once and replacing Sn N times to realize the fast, high-precision, non-contact ROC detection of N pieces of spherical optics, which enables the high-efficiency and high-precision measurement of large quantities of spherical optics.