Accurate EOM-based phase-shifting digital holography with a monitoring interferometer

Abstract

Phase-shifting digital holography (PSDH) can effectively remove the zero-order term and twin image in on-axis holography, but the phase-shifting error deteriorates the quality of reconstructed object images. In this paper, accurate PSDH with an electro-optic modulator (EOM) is proposed. The EOM is used to generate the required phase shift of on-axis digital holography, and the required phase shift is precisely measured with orthogonal detection of a homodyne interferometer and controlled with proportional-integral-derivative feedback in real time. The merits of our method are that it can achieve fast and accurate phase shifting without mechanical motion or sacrificing the resolution and field of view. The optical configuration was designed, an experimental setup was constructed, and real-time phase shifting was realized. Experiments of the phase-shifting accuracy evaluation, suppression effectiveness of the zero-order and twin image terms, and the specimen measurement demonstrate that the proposed method has significant application for precision topography measurement.