Interferometric metrology probe for highly sloped freeform optics

Abstract

A wide variety of systems are employed to measure the surface profile of aspheric and freeform optical surfaces. Freeform metrology systems must accurately characterize the full surface under test, which can be difficult with steep surface slopes. Here we present an interferometric surface metrology probe for highly sloped aspheric and freeform optical surfaces. The optical design of this probe allows the measurement of surface slopes up to 50 deg without tilting the probe, which simplifies stage design and increases the accuracy of the system. A spectrally controlled light source is used to create a virtual ball in front of the probe tip to measure the surface distance and angle. This system produces a cloud of points, to which Zernike polynomials are fit and used to reconstruct the surface. We will show sensitivity tests and accuracy results.