Nanoporous structure of a GdF_3 thin film evaluated by variable angle spectroscopic ellipsometry-Reference-Cited by-同舟云学术

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Nanoporous structure of a GdF_3 thin film evaluated by variable angle spectroscopic ellipsometry

Published:2007-05-15 Issue:16 Volume:46 Page:3221
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Wang Jue,Maier Robert,Dewa Paul G.,Schreiber Horst,Bellman Robert A.,Elli David Dawson

Publisher

The Optical Society

Reference17 articles.

1. Ultraviolet optical and microstructural properties of MgF_2 and LaF_3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation

2. Hetero-epitaxial growth and optical properties of LaF3 on CaF2

3. Development of optical coatings for 157-nm lithography I Coating materials

4. Roughness and light scattering of ion-beam-sputtered fluoride coatings for 193 nm

5. Oxide and fluoride coatings for the excimer wavelength 193nm

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