Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference11 articles.
1. Simultaneous measurement of film surface topography and thickness variation using white-light interferometry
2. Thin film thickness profile measurement using an interferometric surface profiler
3. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
4. Extraction of film interface surfaces from scanning white light interferometry
5. Transparent film profiling and analysis by interference microscopy
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