Affiliation:
1. The Research Center for Special Optics and Optoelectronic Systems (TOPTEC)
Abstract
Digital holographic microscopy (DHM) is an effective method for the evaluation of
surface topography. It combines the high lateral resolution of
microscopy with the high axial resolution of interferometry. In this
paper, DHM with subaperture stitching for tribology is presented. The
developed approach allows large surface area inspection by stitching
together multiple measurements, which brings a big advantage to the
evaluation of tribological tests such as a tribological track on a
thin layer. The whole track measurement provides additional
parameters, which can offer more information on the result of the
tribological test than the conventional four-profile measurement by a
contact profilometer.
Funder
Ministerstvo Školství, Mládeže a Tělovýchovy
Technická Univerzita v Liberci
Grantová Agentura České Republiky
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering