Design and experimental demonstration of electromagnetic actuation utilized on micrograting accelerometers
Author:
Funder
National Natural Science Foundation of China (NSFC)
Publisher
The Optical Society
Reference13 articles.
1. High-resolution micromachined interferometric accelerometer
2. Optical accelerometer based on grating interferometer with phase modulation technique
3. Measurement of a laterally deformable optical MEMS grating transducer
4. Fabrication and Characterization of a Micromachined Acoustic Sensor With Integrated Optical Readout
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1. Implementation of a high-resolution micro-grating accelerometer using a subdivision interpolation technique;Applied Optics;2024-07-29
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3. A Displacement-Based TMR-Type Accelerometer for a High Sensitivity With a Wide Detection Range;IEEE Sensors Journal;2022-10-15
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