TECHNICAL NOTE Applications of the normal-incidence rotating-sample ellipsometer to high- and low-spatial-frequency gratings
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Published:1996-05-01
Issue:13
Volume:35
Page:2235
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ISSN:0003-6935
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Container-title:Applied Optics
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language:en
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Short-container-title:Appl. Opt.
Author:
Cui Y.,Azzam R. M. A.
Publisher
The Optical Society
Cited by
8 articles.
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