High-efficiency diffractive beam splitters surface-structured on submicrometer scale using deep-UV interference lithography
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Publisher
The Optical Society
Reference16 articles.
1. Versatile light-control schemes based on diffractive optics for laser drilling, cutting, and joining technologies for microelectronic and micromechanical components and devices
2. Chromatic-distortion compensation in splitting and focusing of femtosecond pulses by use of a pair of diffractive optical elements
3. Microstructuring transparent materials by use of nondiffracting ultrashort pulse beams generated by diffractive optics
4. Optical elements with ultrahigh spatial-frequency surface corrugations
5. Some application cases and related manufacturing techniques for optically functional microstructures on large areas
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