Ultra-low stress SiO2 coatings by ion beam sputtering deposition
Author:
Funder
Office of Naval Research
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference20 articles.
1. Deformable mirrors: design fundamentals, key performance specifications, and parametric trades
2. Active optics: A new technology for the control of light
3. Image-based adaptive optics for two-photon microscopy
4. Intrinsic stress in sputter-deposited thin films
5. Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region
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1. The buffer – Free semitransparent perovskite solar cells with ion-beam sputtered back electrode;Solar Energy Materials and Solar Cells;2024-03
2. Ion-Beam Sputtering of NiOx Hole Transporting Layers for p–i–n Halide Perovskite Solar Cells;ACS Applied Energy Materials;2024-01-12
3. Hydrogen-Induced Ultralow Optical Absorption and Mechanical Loss in Amorphous Silicon for Gravitational-Wave Detectors;Physical Review Letters;2023-12-21
4. Determination of stress in thin films using micro-machined buckled membranes;Journal of Vacuum Science & Technology A;2023-05-19
5. Effect of Ar Flow Rates on the Insulation Properties of Sio2 Thin Films Prepared by Ion Beam Sputtering;2023
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