Funder
National Science Foundation
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference50 articles.
1. Trends in optical design of projection lenses for UV and EUV lithography;Ulrich,2000
2. UV physics and optics;DıazDe Mora,2000
3. Metalenses at visible wavelengths: past, present, perspectives
Cited by
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