Funder
National Science and Technology Major Project of China
Natural Science Foundation of Shanghai
Subject
Atomic and Molecular Physics, and Optics
Cited by
3 articles.
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1. Polarization aberration in-situ measurement in lithography tools;10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies;2021-12-13
2. Tolerance analysis of non-depolarizing double-pass polarimetry;PhotoniX;2020-08-12
3. Simplified Analytical Method for Error Sources in Mueller Matrix Imaging Polarimeter;Acta Optica Sinica;2019