Development in situ for gratings recorded in photoresist
Author:
Publisher
The Optical Society
Reference7 articles.
1. Mirror Blank Testing by Real-Time Holographic Interferometry
2. Rapid in situ processing for real-time holographic interferometry
3. In situ end-point detection during development of submicrometer grating structures in photoresist
4. Decoupling thex,yandzdisplacement components in a rotating disc using three-dimensional pulsed digital holography
5. Fracture detection by grating moiré and in-plane ESPI techniques
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1. Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method;Optics Express;2018-09-14
2. In-plane displacement measurement by using circular grating Talbot interferometer;Optics and Lasers in Engineering;2015-12
3. Three-dimensional deformation measurement from the combination of in-plane and out-of-plane electronic speckle pattern interferometers;Applied Optics;2004-08-20
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