Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference20 articles.
1. Fractal conical lenses
2. High-resolution optical coherence tomography over a large depth range with an axicon lens
3. Analysis of the combined impact of the laser spectrum, illuminator miscalibrations, and lens aberrations on the 90nm technology node imaging with off-axis illuminations
4. Novel illumination apertures for resolution-enhanced technology and through-pitch critical dimension control
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