Stability and normal incidence reflectivity of W/B4C multilayer mirror near the boron K absorption edge
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference22 articles.
1. Soft X-Ray Optics
2. Normal-incidence x-ray mirror for 7 nm
3. Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm)
4. Multilayer mirror for x rays below 190 eV
5. Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography
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3. Investigation of long term stability of W/B4C multilayer structures;Thin Solid Films;2022-08
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