Abstract
This paper conducts an experimental evaluation of the optical properties of mass-productive metal-insulator-metal linear taper waveguides for nanofocusing. The vertical linear tapers, with controlled angles in the 12-51 degrees range, were realized with dry etching and mixed gas, while tip-thickness was precisely controlled with atomic layer deposition. The transmission efficiency of the linear taper was measured employing an input grating and a single output slit. The maximum transmission efficiency was estimated at 64% at a taper angle of 30 degrees, which aligned with the calculations. This experimental evaluation provides guidance for the design of practical nanofocusing components.
Funder
Thailand Science Research and Innovation
Subject
Atomic and Molecular Physics, and Optics