Abstract
Modern glass producers like SCHOTT are producing and developing optical
materials for various specialized applications in photonics and
optical and microlithography technology. To achieve the
specifications, huge efforts in metrology R&D activities have been
made, and specialized tools have been developed and installed in the
metrology labs over the last decades. The optical material quality
requirements of such materials have been extremely high, and a
continuous increase in activities has been necessary and is still
required. Therefore further development and implementation of
diagnostics have been performed, like optical spectroscopy and
refractography, over the last decades. In the past and today, special
diagnostics have been available to qualify materials for the absolute
refractive index, transmission, radiation durability, and inner
quality to ensure the quality of the produced materials. Methods used
for this qualification are minimum deviation, precision spectral
photometers, in-situ transmission measurements using UV lasers, and
Rayleigh scattering. We present some past activities for metrology
that have been necessary to visualize the status and the improvement
of the optical quality with the help of new and continuously improved
metrology.
Subject
Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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