Fabrication of 50 nm period gratings with multilevel interference lithography
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference17 articles.
1. Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating
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4. Broadband antireflection gratings fabricated upon silicon substrates
5. Diffraction of Atoms by a Transmission Grating
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