Grating-based metasurfaces for ultra-narrow near-infrared bandpass filtering with wide out-of-band suppression

Abstract

Here, we present a straightforward strategy for designing silicon grating-based metasurfaces tailored for narrow near-infrared bandpass filtering. By selecting appropriate structural parameters for the grating and including periodic groove perturbations within each grating slit, transverse guided mode resonances (GMRs) propagating perpendicular and parallel to the grating slit are created to provide wide out-of-band suppression and high-Q filter responses, respectively. The destructive and constructive interference between radiations from groove perturbations are then introduced to eliminate all GMRs except one, producing a single-band bandpass filter. Simply adjusting the period of the groove perturbations allows precise tuning of the passband’s central wavelength across the operational spectral range from 1350 nm to 1750nm, throughout which the passband exhibits a Q-factor exceeding 9,000 and the attenuation level outside the passband remains below 1%. Furthermore, our proposed narrow bandpass filters are found to be robust against the potential fabrication imperfections, such as variations in groove size and position.