Simple reflow technique for fabrication of a microlens array in solgel glass
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference8 articles.
1. Technique for monolithic fabrication of microlens arrays
2. Technique for monolithic fabrication of silicon microlenses with selectable rim angles
3. Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam�sensitive gray-scale mask
4. Reflow and burial of channel waveguides formed in sol-gel glass on Si substrates
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