20-nm-resolution Soft x-ray microscopy demonstrated by use of multilayer test structures-Reference-Cited by-同舟云学术

20-nm-resolution Soft x-ray microscopy demonstrated by use of multilayer test structures

Published:2003-11-01 Issue:21 Volume:28 Page:2019
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Chao Weilun,Anderson Erik,Denbeaux Gregory P.,Harteneck Bruce,Liddle J. Alexander,Olynick Deirdre L.,Pearson Angelic L.,Salmassi Farhad,Song Cheng Yu,Attwood David T.

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference15 articles.

1. New high‐resolution zone‐plate microscope at beamline 6.1 of the ALS

2. Soft X-ray microscopy to 25nm with applications to biology and magnetic materials

3. Science with Soft X Rays

4. Study of in-plane magnetic domains with magnetic transmission x-ray microscopy

5. Electromigration in passivated Cu interconnects studied by transmission x-ray microscopy

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