Optical weak measurement for the precise thickness determination of an ultra-thin film

Author:

Zhao Jing-Ru1,Wu Zhen-Jie2,Wang Gui-Qiang3ORCID,Wang Chun-Nan,Deng Bo-Fu,Sun Shu-Qing

Affiliation:

1. Tsinghua University

2. The State Key Laboratory of Laser Interaction with Matter

3. Hefei University of Technology

Abstract

A total internal reflection system based on the weak value amplification principle is set up for the precise measurement of the thickness of an ultra-thin film. In this system, the film thickness is derived from the change of the double-peak pointer caused by the effective refractive index of the film, which is correlated to its thickness. The sensitivity and resolution of this system reached 2727.21 nm/RIU and 7.2 × 10 6 R I U , respectively, determined by using a sodium chloride solution with a refractive index of 1.331911. The growth process of TA/Fe(III) assembled films with thicknesses in the few nanometers range is monitored using the as-set-up system, and the experimental results are consistent with a theoretical calculation based on the Maxwell Garnett effective medium. Additionally, we theoretically calculated the detection limit for the thickness measurement of the film as 22 pm. We clearly provide a potential method for the precise measurement of the thickness of an ultra-thin film.

Funder

National Natural Science Foundation of China

Shenzhen Fundamental Research Program

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

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